13th International Conference on Fracture June 16–21, 2013, Beijing, China -4- Table 1. Material properties Silicon Resin Young’s modulus (GPa) 166 5.49 Poisson’s ratio 0.26 0.32 Table 2. Computational conditions Radius of curvature R (μm) 0.000 3.125 6.250 12.500 Number of nodes 27,607 15,467 16,423 21,727 Figure 5. Variation of stress distribution σφφ on silicon surface with respect to angle φ (R=0mm) Figure 6. Variation of stress distribution σφφ on silicon surface at angle direction φ =315° with respect to radius of curvature R
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