13th International Conference on Fracture June 16–21, 2013, Beijing, China -4- Figure 3. Integrating sphere reflectivity spectrums of SiC films Integrating sphere reflectivity spectrums of the irradiated films and contrast films are measured at a wavelength range from 300nm to 1000nm. As Fig. 3 shows, the two kind of films demonstrate quite similar spectrums. 4.2. Hardness and Young modulus Nano-indentation method was employed to measure and calculated the hardness and Young modulus of the films. The displacement in the irradiated films at the maximum load force of 10000μN is 367nm, while the contrast one is 230nm. Fig. 4 shows the load-displacement curves of the films at a load force of 1500μN. Figure 4. Load-displacement curves of the films in nano-indentation process
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