13th International Conference on Fracture June 16–21, 2013, Beijing, China -5- The average hardness and Young modulus of the films are calculated and listed in Table 4. The irradiated films demonstrate both lower hardness and young modulus than the contrast one, i.e., the contrast film is more robust than the irradiated film. Table 4. The average hardness and Young modulus of the films. Samples Hardness (GPa) Young modulus (GPa) Irradiated samples 9.22 103.54 Contrast samples 10.66 114.46 Difference 15.6% 11% 4.3. Friction coefficient Nano-scratch method was employed to measure friction coefficients of the films. Load force of 2000μN and 5000μN were used, the results are listed in Table 5. Allowing for the influence of surface roughness of the films, the friction coefficients of the two kinds of films demonstrates no significant difference at each load force. Fig. 5 shows the friction coefficients of the films at a load force of 5000μN during a nano-scratch scan process of 6μm. Table 5. Friction coefficients at different load force. Samples Load Force(μN) Friction coefficient Irradiated sample 2000 0.108 5000 0.154 Contrast sample 2000 0.096 5000 0.151 Figure 5. Friction coefficients at a load force of 5000μN during a nano-scratch scan process . 5. Conclusion The radiation effects of 1MeV protons on amorphous SiC films are studied. According to calculated results of SRIM-2012 software package, the projected range of crystalline SiC is shorter than hydrogenated amorphous SiC. Hydrogenated SiC with the same width as crystalline SiC may
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