13th International Conference on Fracture June 16–21, 2013, Beijing, China -7- area is small (Fig. 8(b)). The result also shows that the situation of single anchor is severer than that of array-shaped anchor (Fig. 8(b)). It can be concluded that the bonding quality of array-shaped anchor (Fig. 9) is higher than that of the conventional single one and the bonding quality become poorer with a further adjacent reference anchor (Fig. 8(b)). Figure 8. SEM photograph of bonding quality testing devices In order to obtain the bond yield of array-shaped anchor and single anchor, 100 cantilever beams at each bonding area are selected by optical microscope and dropping out situations of them are observed. Figure 10 shows the statistical result, which proves the bonding quality of array-shaped anchor is higher than that of single anchor again. In addition, with the increasing of the bonding area, the bond yield become higher and the bond yield is 100% when the bonding area is bigger than 484μm 2. Figure 9. SEM photograph of array-shaped anchor
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