13th International Conference on Fracture June 16–21, 2013, Beijing, China -9- single anchor bonding surface when the anchor stands torque, and this region contributes little to the bonding strength. However, there is no such low stress region in the array-shaped anchor when it stands torque. Therefore, array-shaped anchor has a stronger torsional bonding strength. Figure 12. SEM photograph of cantilever beam and measuring scale 0 200 400 600 800 1000 1200 1400 1600 0 5 10 15 20 25 30 35 array-shaped anchor single anchor torsional strength ( 5.325E-7 Nm) bonding area ( um2 ) Figure 13. Correlation between torsional bonding strength and bonding area 5. Conclusion A novel array-shaped anchor design scheme for microdevices fabricated by silicon-on-glass process was proposed. This anchor design was based on bonding strength consideration and consisted of four identical sub-anchors. The bonding quality test has verified that, compared with conventional single anchor, the proposed array-shaped anchor is beneficial to release the CTE mismatch induced
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